JPH029704B2 - - Google Patents

Info

Publication number
JPH029704B2
JPH029704B2 JP57235066A JP23506682A JPH029704B2 JP H029704 B2 JPH029704 B2 JP H029704B2 JP 57235066 A JP57235066 A JP 57235066A JP 23506682 A JP23506682 A JP 23506682A JP H029704 B2 JPH029704 B2 JP H029704B2
Authority
JP
Japan
Prior art keywords
chip
diaphragm
pressure
signal
sensors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57235066A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58120142A (ja
Inventor
Bii Sutaa Jeemusu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honeywell Inc
Original Assignee
Honeywell Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honeywell Inc filed Critical Honeywell Inc
Publication of JPS58120142A publication Critical patent/JPS58120142A/ja
Publication of JPH029704B2 publication Critical patent/JPH029704B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
    • G01L9/06—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices
    • G01L9/065—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices with temperature compensating means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
JP23506682A 1982-01-04 1982-12-29 半導体圧力変換器 Granted JPS58120142A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US33699582A 1982-01-04 1982-01-04
US336995 1982-01-04

Publications (2)

Publication Number Publication Date
JPS58120142A JPS58120142A (ja) 1983-07-16
JPH029704B2 true JPH029704B2 (en]) 1990-03-05

Family

ID=23318646

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23506682A Granted JPS58120142A (ja) 1982-01-04 1982-12-29 半導体圧力変換器

Country Status (4)

Country Link
EP (1) EP0083496B1 (en])
JP (1) JPS58120142A (en])
CA (1) CA1186163A (en])
DE (1) DE3274583D1 (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001509267A (ja) * 1997-01-15 2001-07-10 ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング 半導体圧力センサ

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4874742A (en) * 1981-01-05 1989-10-17 Synthetic Blood Corporation Synthetic whole blood and a process for preparing the same
US4672853A (en) * 1984-10-30 1987-06-16 Burr-Brown Corporation Apparatus and method for a pressure-sensitive device
JP2544435B2 (ja) * 1988-04-06 1996-10-16 株式会社日立製作所 多機能センサ
DE4000326C2 (de) * 1990-01-08 1995-12-14 Mannesmann Ag Drucksensor
US5583295A (en) * 1994-03-14 1996-12-10 Nippondenso Co., Ltd. Pressure sensor having gauge resistors and temperature compensating resistors on the same surface
US6142021A (en) * 1998-08-21 2000-11-07 Motorola, Inc. Selectable pressure sensor
WO2000012003A1 (en) * 1998-08-26 2000-03-09 Becton, Dickinson And Company Air coupled pressure tip cannula for by-pass surgery
DE19957556A1 (de) * 1999-11-30 2001-05-31 Bosch Gmbh Robert Halbleiter-Drucksensor und Meßanordnung
DE50313527D1 (de) 2003-07-03 2011-04-21 Grundfos As Differenzdrucksensor
JP4511844B2 (ja) * 2004-02-05 2010-07-28 横河電機株式会社 圧力センサ及び圧力センサの製造方法
DE502004011268D1 (de) 2004-09-24 2010-07-22 Grundfos As Drucksensor
DE102006062222A1 (de) * 2006-12-22 2008-06-26 Endress + Hauser Gmbh + Co. Kg Differenzdrucksensor mit Kompensation des statischen Drucks
WO2013057689A1 (en) * 2011-10-21 2013-04-25 Ecole Polytechnique Federale De Lausanne (Epfl) SiC HIGH TEMPERATURE PRESSURE TRANSDUCER
JP6090742B2 (ja) 2013-02-28 2017-03-08 日立オートモティブシステムズ株式会社 圧力検出装置
GB2521163A (en) 2013-12-11 2015-06-17 Melexis Technologies Nv Semiconductor pressure sensor
US10317297B2 (en) 2013-12-11 2019-06-11 Melexis Technologies Nv Semiconductor pressure sensor
EP3032235B1 (en) 2014-12-10 2017-09-20 Melexis Technologies NV Semiconductor pressure sensor
JP7294009B2 (ja) * 2019-09-09 2023-06-20 Tdk株式会社 圧力センサ
CN114152369B (zh) * 2020-09-07 2024-10-08 中国科学院微电子研究所 一种mems压阻式压力传感器及压阻排布方法
CN112763128B (zh) * 2020-12-09 2022-08-23 武汉船用电力推进装置研究所（中国船舶重工集团公司第七一二研究所） 一种硅压力传感器的温度补偿电路
EP4492029A3 (en) * 2023-02-27 2025-03-12 Melexis Technologies NV Pressure sensor resistor configuration for stress compensation

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3456226A (en) * 1967-10-27 1969-07-15 Conrac Corp Strain gage configuration
JPS5451489A (en) * 1977-09-30 1979-04-23 Toshiba Corp Semiconductor pressure converter
JPS54131892A (en) * 1978-04-05 1979-10-13 Hitachi Ltd Semiconductor pressure converter
JPS5941134B2 (ja) * 1980-04-15 1984-10-04 富士電機株式会社 圧力変換器
JPS5723830A (en) * 1980-07-18 1982-02-08 Hitachi Ltd Post material for pressure transducer of semiconductor and its preparation

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001509267A (ja) * 1997-01-15 2001-07-10 ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング 半導体圧力センサ

Also Published As

Publication number Publication date
DE3274583D1 (en) 1987-01-15
EP0083496A2 (en) 1983-07-13
EP0083496B1 (en) 1986-12-03
CA1186163A (en) 1985-04-30
JPS58120142A (ja) 1983-07-16
EP0083496A3 (en) 1983-08-31

Similar Documents

Publication Publication Date Title
JPH029704B2 (en])
US4530244A (en) Semiconductor pressure transducer
US7395718B2 (en) Reliable piezo-resistive pressure sensor
JP2656566B2 (ja) 半導体圧力変換装置
US5537882A (en) Semiconductor sensor for detecting physical amount without thermal hypsteresis where output wiring is disposed in a stress insensitive direction
US5291788A (en) Semiconductor pressure sensor
JP2002277337A (ja) 差圧・圧力センサ
JPH09329516A (ja) 半導体圧力センサ及びこれを用いた複合伝送器
JPH0447244A (ja) 半導体圧力センサ
JPH07311110A (ja) 複合センサ及びこれを用いた複合伝送器
JPS6222272B2 (en])
JP2512220B2 (ja) 複合機能形センサ
JPH0455542B2 (en])
JP3071932B2 (ja) 半導体圧力センサ
JPH03249532A (ja) 半導体圧力計
JP2859982B2 (ja) 半導体圧力センサ
JPH02256278A (ja) 半導体圧力センサ
JP2573539Y2 (ja) 半導体圧力センサ
JP2756067B2 (ja) ダイアフラム式歪みセンサの配線パターン
JP3120388B2 (ja) 半導体圧力変換器
JPS61213645A (ja) 荷重検出器
JPH0797058B2 (ja) 半導体圧力変換器
GB2107924A (en) Strain gauge pressure transducers
JP2980440B2 (ja) 半導体圧力センサおよびその製造方法
JPH0744992Y2 (ja) 圧力センサ